3D Technology

Integrated Measurement System

3D Technology

LWSI

Large FOV White light Scanning Interferometer

General WSI

(White Light Scanning interferometer)

Large FOV

High Speed Camera &
High Speed Image processing module

Special Illumination Technique

INTEKPLUS’s LWSI
In order to apply the 3D measurement precision of the WSI optical system to the mass production process of high-end products, we developed the LWSI optical system with improved WSI. A high-resolution camera, special beam splitter and lighting, and a dedicated Image Processing Modules are used to complete a system that adds productivity to high inspection performance.
Slit Beam Scanning
  • Single Camera
    Slit Beam Scanning (General Type)
  • Dual Camera
    Slit Beam Scanning (INTEKPLUS Patent)

    Dual Slit Beam Metrology, patented by INTEKPLUS, measures true 3D of all inspection areas without hidden areas.

Application of Slit Beam
  • Semiconductor PKG

  • Semiconductor PKG

Phase Measuring Profilometry
Phase Measuring Profilometry (Moire)

INTEKPLUS's advanced Phase Measurement Profilometry equipped with a powerful algorithm precisely detects micro defects in a wide areas such as the body surface.

Basic concept of PMP
Application of PMP
Stereo Camera Triangulation - 3D
Stereo Camera Triangulation Metrology

INTEKPLUS' Stereo Camera Triangulation Metrology combines Real Time image processing technology and powerful algorithms to measure true 3D in real time, regardless of object reflection and color.

  • Real 3D Image + Z map

  • Z map

  • Real 3D Image + Z map

  • Z map